JPH0127599B2 - - Google Patents
Info
- Publication number
- JPH0127599B2 JPH0127599B2 JP60069875A JP6987585A JPH0127599B2 JP H0127599 B2 JPH0127599 B2 JP H0127599B2 JP 60069875 A JP60069875 A JP 60069875A JP 6987585 A JP6987585 A JP 6987585A JP H0127599 B2 JPH0127599 B2 JP H0127599B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- holes
- workpiece
- mask
- hollow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005192 partition Methods 0.000 claims description 13
- 239000012530 fluid Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 6
- 239000011346 highly viscous material Substances 0.000 claims 4
- 238000007373 indentation Methods 0.000 claims 3
- 238000003825 pressing Methods 0.000 claims 2
- 235000012490 fresh bread Nutrition 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 36
- 239000000919 ceramic Substances 0.000 description 17
- 239000004020 conductor Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000010960 cold rolled steel Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000012858 resilient material Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0134—Drum, e.g. rotary drum or dispenser with a plurality of openings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0191—Using tape or non-metallic foil in a process, e.g. during filling of a hole with conductive paste
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
- H05K3/0088—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor for treatment of holes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Manufacturing Of Electrical Connectors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/595,658 US4519760A (en) | 1984-04-02 | 1984-04-02 | Machine for filling via holes in an integrated circuit package with conductive ink |
US595658 | 1984-04-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6110295A JPS6110295A (ja) | 1986-01-17 |
JPH0127599B2 true JPH0127599B2 (en]) | 1989-05-30 |
Family
ID=24384139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60069875A Granted JPS6110295A (ja) | 1984-04-02 | 1985-04-01 | 充填用機械 |
Country Status (3)
Country | Link |
---|---|
US (1) | US4519760A (en]) |
JP (1) | JPS6110295A (en]) |
DE (1) | DE3511723A1 (en]) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4747211A (en) * | 1987-02-09 | 1988-05-31 | Sheldahl, Inc. | Method and apparatus for preparing conductive screened through holes employing metallic plated polymer thick films |
US4856424A (en) * | 1988-02-10 | 1989-08-15 | Nippon Cmk Corporation | Apparatus for filler taping screen frame and apparatus for applying filling liquid to screen frame |
US4942076A (en) * | 1988-11-03 | 1990-07-17 | Micro Substrates, Inc. | Ceramic substrate with metal filled via holes for hybrid microcircuits and method of making the same |
US4902371A (en) * | 1988-12-12 | 1990-02-20 | International Business Machines Corporation | Mask shock absorbing system and method of using the same |
US5948533A (en) * | 1990-02-09 | 1999-09-07 | Ormet Corporation | Vertically interconnected electronic assemblies and compositions useful therefor |
JPH0614582B2 (ja) * | 1990-11-19 | 1994-02-23 | 日本シイエムケイ株式会社 | ホールマスキング装置 |
US5174201A (en) * | 1991-06-07 | 1992-12-29 | International Business Machines Corporation | Thick film mask separation detection system |
US5242641A (en) * | 1991-07-15 | 1993-09-07 | Pacific Trinetics Corporation | Method for forming filled holes in multi-layer integrated circuit packages |
JP3166251B2 (ja) * | 1991-12-18 | 2001-05-14 | 株式会社村田製作所 | セラミック多層電子部品の製造方法 |
US5284189A (en) * | 1992-03-16 | 1994-02-08 | Printron, Inc. | Conductive ink packaging for printed circuit board screen printing operations |
JP3254289B2 (ja) * | 1993-03-18 | 2002-02-04 | 理想科学工業株式会社 | 孔版印刷方法および装置 |
US5831828A (en) * | 1993-06-03 | 1998-11-03 | International Business Machines Corporation | Flexible circuit board and common heat spreader assembly |
JP3676845B2 (ja) * | 1995-05-11 | 2005-07-27 | 理想科学工業株式会社 | 簡易な構造の減圧式孔版印刷方法および装置 |
JPH10129098A (ja) * | 1996-10-30 | 1998-05-19 | Riso Kagaku Corp | 減圧式孔版印刷方法及び装置 |
US6073554A (en) * | 1998-02-13 | 2000-06-13 | Cutcher, Sr.; Thomas V. | Ink shield screen printing assembly and process |
JP3448703B2 (ja) * | 1999-02-15 | 2003-09-22 | ミナミ株式会社 | スクリーン印刷機 |
US7005179B2 (en) * | 2002-07-26 | 2006-02-28 | The Regents Of The University Of California | Conductive inks for metalization in integrated polymer microsystems |
US7036220B2 (en) * | 2003-12-18 | 2006-05-02 | The Regents Of The University Of California | Pin-deposition of conductive inks for microelectrodes and contact via filling |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3226255A (en) * | 1961-10-31 | 1965-12-28 | Western Electric Co | Masking method for semiconductor |
US3172358A (en) * | 1962-04-11 | 1965-03-09 | Weiss Franz | Suction stenciling apparatus |
US3530792A (en) * | 1967-11-13 | 1970-09-29 | Jose Valiela | Apparatus for underglaze ceramic decoration |
DD112576A1 (en]) * | 1974-06-17 | 1975-04-12 | ||
US4043683A (en) * | 1974-06-20 | 1977-08-23 | Loctite Corporation | Dispensing and wiping device |
US4094716A (en) * | 1974-10-07 | 1978-06-13 | Iberica De Calcomanias, S.A. | Method of and apparatus for decorating articles with decalcomanias |
-
1984
- 1984-04-02 US US06/595,658 patent/US4519760A/en not_active Expired - Lifetime
-
1985
- 1985-03-30 DE DE19853511723 patent/DE3511723A1/de active Granted
- 1985-04-01 JP JP60069875A patent/JPS6110295A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
US4519760A (en) | 1985-05-28 |
JPS6110295A (ja) | 1986-01-17 |
DE3511723C2 (en]) | 1993-01-28 |
DE3511723A1 (de) | 1985-10-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |